{"id":86,"date":"2009-05-25T13:20:37","date_gmt":"2009-05-25T13:20:37","guid":{"rendered":"https:\/\/webs.uab.cat\/ecas\/research\/"},"modified":"2022-08-22T13:32:08","modified_gmt":"2022-08-22T13:32:08","slug":"research","status":"publish","type":"page","link":"https:\/\/webs.uab.cat\/ecas\/research\/","title":{"rendered":"Research"},"content":{"rendered":"\n<p>The ECAS group research objective is the conception of new MEMS\/NEMS devices focusing in resonators and relays for different applications.<\/p>\n\n\n\n<p><strong>Key words:<\/strong><\/p>\n\n\n\n<p>NEMS, MEMS, CMOS-MEMS, RF-MEMS, MEMS sensors, MEMS relays, mechanical resonators, oscillators,<\/p>\n\n\n\n<p>M\/NEMS integration, CMOS-VLSI, nanofabrication, micro-nanotechnologies, System-on-chip solutions,<\/p>\n\n\n\n<p>PMUT&#8217;s, ultrasound transducers, piezoelectric transducers<\/p>\n\n\n\n<figure class=\"wp-block-image\"><img loading=\"lazy\" decoding=\"async\" width=\"750\" height=\"265\" src=\"https:\/\/webs.uab.cat\/ecas\/wp-content\/uploads\/sites\/181\/2010\/01\/imagenvaries.png\" alt=\"\" class=\"wp-image-83\" srcset=\"https:\/\/webs.uab.cat\/ecas\/wp-content\/uploads\/sites\/181\/2010\/01\/imagenvaries.png 750w, https:\/\/webs.uab.cat\/ecas\/wp-content\/uploads\/sites\/181\/2010\/01\/imagenvaries-300x106.png 300w\" sizes=\"auto, (max-width: 750px) 100vw, 750px\" \/><\/figure>\n\n\n\n<p>Example of different mechanical resonators (SEM images) integrated monolithically with a CMOS circuitry (right optical image)<\/p>\n","protected":false},"excerpt":{"rendered":"<p>The ECAS group research objective is the conception of new MEMS\/NEMS devices focusing in resonators and relays for different applications. Key words: NEMS, MEMS, CMOS-MEMS, RF-MEMS, MEMS sensors, MEMS relays, mechanical resonators, oscillators, M\/NEMS integration, CMOS-VLSI, nanofabrication, micro-nanotechnologies, System-on-chip solutions, PMUT&#8217;s, ultrasound transducers, piezoelectric transducers Example of different mechanical resonators (SEM images) integrated monolithically with [&hellip;]<\/p>\n","protected":false},"author":20,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":""},"class_list":["post-86","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/webs.uab.cat\/ecas\/wp-json\/wp\/v2\/pages\/86","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/webs.uab.cat\/ecas\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/webs.uab.cat\/ecas\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/webs.uab.cat\/ecas\/wp-json\/wp\/v2\/users\/20"}],"replies":[{"embeddable":true,"href":"https:\/\/webs.uab.cat\/ecas\/wp-json\/wp\/v2\/comments?post=86"}],"version-history":[{"count":1,"href":"https:\/\/webs.uab.cat\/ecas\/wp-json\/wp\/v2\/pages\/86\/revisions"}],"predecessor-version":[{"id":326,"href":"https:\/\/webs.uab.cat\/ecas\/wp-json\/wp\/v2\/pages\/86\/revisions\/326"}],"wp:attachment":[{"href":"https:\/\/webs.uab.cat\/ecas\/wp-json\/wp\/v2\/media?parent=86"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}