Citation Key
165
COinS Data

Secondary Authors
A. F. Lopeandía, F.J. Muñoz, J. Rodriguez-Viejo, and E. Leon-Gutierrez
Short Title
Microelectronic Engineering 84 (2007) 1288–1291
URL
http://dx.doi.org/10.1016/j.mee.2007.01.054
Year of Publication
2007