Residual stress and texture in polycrystalline 3C-SiC thin films grown by LPCVD

Authors

E Hurtós and J. Rodríguez-Viejo

Citation Key

212

COinS Data

Short Title

J.Appl.Phys., 87 (2000) 1748-1760

URL

http://dx.doi.org/10.1063/1.372087

Year of Publication

2000