- Authors
- A.F. Lopeandia, F.J. Muñoz, M. T. Clavaguera-Mora, M Chacón, and J. Rodríguez-Viejo
- Citation Key
- 183
- COinS Data
- Short Title
- J. Micromechanics and Microengineering, 16 (2006) 965-971
- URL
- http://dx.doi.org/10.1088/0960-1317/16/5/013
- Year of Publication
- 2006