Authors
Jordi Fraxedas, Eric Pellegrin, Vincent Carlino, Salvador Ferrer, Massimo Tallarida, Guillaume Sauthier, and Max Schütte
Citation Key
337
COinS Data

DOI
https://doi.org/10.1016/j.apsusc.2020.148684
ISSN
0169-4332
Keywords
Band bending, Carbon contamination, Inductively-coupled RF plasma, Silicon oxide, Surface defects, Thin-film coatings, Titanium oxide, Ultrahigh vacuum chamber walls, X-ray photoemission spectroscopy
Pagination
148684
Journal
Applied Surface Science
URL
https://www.sciencedirect.com/science/article/pii/S0169433220334425
Volume
542
Year of Publication
2021