- Authors
- J. A. Pardo, J. Rodriguez-Viejo, M. I. Alonso, A. R. Goñi, A. Bernardi, F. Pi, G. Garcia, and E. Leon-Gutierrez
- Citation Key
- 180
- COinS Data
- Short Title
- Materials Science in Semiconductor Processing, Vol: 9 (4-5), 806-811; 2006
- URL
- http://dx.doi.org/10.1016/j.mssp.2006.08.078
- Year of Publication
- 2006