Authors E. Miranda, X. Aymerich, M. Nafría, R. Rodríguez, and J. Suñé Citation Key 265 COinS Data Date Published 1999 Pagination 161-164 Journal Microelectronics and Reliability Volume 39 Year of Publication 1999 ← Modeling the breakdown spots in silicon dioxide films as point contacts → Soft breakdown in ultrathin SiO2 layers: the conduction problem from a new point of view