- Authors
- J. Martín-Martínez, F. Campabadal, M. Nafría, R. Rodríguez, M B González, M. Pedró, and N. Jiménez
- Citation Key
- 442
- COinS Data
- Conference Location
- Catania, Italy
- Conference Name
- Workshop on Dielectrics in Microelectronics (WoDiM)
- Year of Conference
- 2016