Authors E. Miranda, X. Aymerich, M. Nafría, R.Rodríguez, and J. Suñé Citation Key 260 COinS Data Date Published 2000 Pagination 687-690 Journal Microelectronics and Reliability Volume 40 Year of Publication 2000 ← Soft Breakdown Conduction in Ultrathin (3-5nm) Gate Dielectrics → Relation between defect generation, SILC and soft-breakdown in thin (< 5nm) oxides