Authors M. Lanza, G. Ghidini, A. Sebastiani, x: Aymerich, M. Nafría, and M. Porti Citation Key 309 COinS Data Date Published 2009 Conference Name Proceedings of the Trends in Nanotechnology conference, 2009 Year of Publication 2009 ← Improving the electrical performance of CAFM for gate oxide reliability measurements → Crystallization effects on the variability of the electrical properties of high-k dielectrics at the nanoscale