Authors
M. Lanza, P. Michalowski, L. Wilde, S. Teichert, G. Jaschke, H. Ranzinger, E. Lodermeier, G. Benstetter, X. Aymerich, M. Nafría, and M. Porti
Citation Key
305
COinS Data

Date Published
JUL-SEP 2009
DOI
10.1016/j.mee.2009.03.020
ISBN Number
463VH
ISSN
0167-9317
Keywords
Atomic Force Microscope; High-k; Electrical characterization
Issue
7-9
Pagination
1921-1924
Journal
Microelectronic Engineering
Start Page
1921
Type of Article
Article; Proceedings Paper
URL
http://www.sciencedirect.com/science/article/pii/S0167931709001622
Volume
88
Year of Publication
2009