Authors
V. Iglesias, G. Bersuker, Z. Y. Shen, G. Benstetter, X. Aymerich, M. Nafría, M. Porti, A. Bayerl, K. Zhang, and M. Lanza
Citation Key
374
COinS Data

Date Published
September 2011
DOI
10.1063/1.3637633
ISSN
0003-6951
Keywords
AFM, Atomic force microscopy, boundaris, electric Breakdown, elemental semiconductors, Grain boundaries, hafnium boundaris, MIS structures, reliability issues, Silicon, silicon compounds, stress
Issue
10
Pagination
239901-239901-1
Journal
APPLIED PHYSICS LETTERS
Start Page
239901
URL
http://ieeexplore.ieee.org/xpl/freeabs_all.jsp?arnumber=6017972&abstractAccess=no&userType=inst
Volume
99
Year of Publication
2011