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- Authors
- V. Iglesias, G. Bersuker, Z. Y. Shen, G. Benstetter, X. Aymerich, M. Nafría, M. Porti, A. Bayerl, K. Zhang, and M. Lanza
- Citation Key
- 374
- COinS Data
- Date Published
- September 2011
- DOI
- 10.1063/1.3637633
- ISSN
- 0003-6951
- Keywords
- AFM, Atomic force microscopy, boundaris, electric Breakdown, elemental semiconductors, Grain boundaries, hafnium boundaris, MIS structures, reliability issues, Silicon, silicon compounds, stress
- Issue
- 10
- Pagination
- 239901-239901-1
- Journal
- APPLIED PHYSICS LETTERS
- Start Page
- 239901
- URL
- http://ieeexplore.ieee.org/xpl/freeabs_all.jsp?arnumber=6017972&abstractAccess=no&userType=inst
- Volume
- 99
- Year of Publication
- 2011