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- Authors
- M. Lanza, X. Aymerich, M. Nafría, M. Porti, and L. Aguilera
- Citation Key
- 308
- COinS Data
- Date Published
- març 2009
- DOI
- 10.1109/SCED.2009.4800474
- ISBN Number
- 978-1-4244-2838-0
- ISSN Number
- BMC41
- Keywords
- THIN SIO2-FILMS; C-AFM; BREAKDOWN; MICROSCOPY; SIO2; DEGRADATION; STRESSES; VOLTAGE; STACKS
- Pagination
- 234-237
- Conference Location
- Spanish
- Publisher
- IEEE, 345 E 47TH ST, NEW YORK, NY 10017 USA
- Conference Name
- PROCEEDINGS OF THE 2009 SPANISH CONFERENCE ON ELECTRON DEVICES
- Section
- 234
- Type of Work
- Proceedings Paper
- URL
- http://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=4800474
- Year of Publication
- 2009