Authors L. Aguilera, X. Aymerich, M. Nafría, J.Grifoll, M. Porti, and M. Lanza Citation Key 174 COinS Data Date Published 2008 Journal Review of Scientific Instruments Start Page 073701 Volume 79 Year of Publication 2008 ← Gate oxide wear-out and breakdown effects on the performance of analog and digital circuits → Influence of Vacuum Environment on Conductive AFM measurements of advanced MOS Gate dielectrics