Authors M. Porti, B. Garrido, O. Jambois, J. Carreras, X. Aymerich, M. Nafría, and M. Avidano Citation Key 205 COinS Data Date Published 2007 Journal Journal of Applied Physics Start Page 064509 Volume 101 Year of Publication 2007 ← Reliability of SiO2 and high-k gate insulators: a nanoscale study with conductive-AFM → Systematic characterization of soft- and hard-breakdown spots using techniques with nanometer resolution