Reliability of SiO2 and high-k gate insulators: a nanoscale study with conductive-AFM

Authors

M. Porti, X. Aymerich, M. Nafría, X. Blasco, and L. Aguilera

Citation Key

204

COinS Data

Date Published

2007

Pagination

501- 505

Journal

Microelectronic Engineering

Volume

84(3)

Year of Publication

2007