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- Accession Number
- 12504180
- Authors
- M. Nafría, X. Aymerich, M. Lanza, J. Martín-Martínez, M. Porti, and R. Rodríguez
- Citation Key
- 366
- COinS Data
- DOI
- 10.1109/IEDM.2011.6131500
- ISBN Number
- 978-1-4577-0504-5
- ISBN
- 978-1-4577-0506-9
- Keywords
- AFM, aging, Atomic force microscopy, atomic force process, circuit simulators, dielectrics, high-k based MOS devices, integrated circuit modeling, integrated circuit performance, Integrated circuit reliability, logic gates, MIS devices, nanoscale, nanosca
- Pagination
- 6.3.1-6.3.4
- Conference Location
- Washington DC, USA
- Conference Name
- 2011 IEEE International Electron Devices Meeting (IEDM)
- URL
- http://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=6131500
- Year of Conference
- 2011