Setups and instrumentation

Optical table 1: HeNe laser vibrometer set-up with PSD deflection readout and photodetector for intensity modulation detection (1GHz) with optical chopper.

Optical table 2: IR laser (1.55um) vibrometer with vacuum chamber and IR photodetector and 4-quadrant detector + diode laser deflection readout system.

Optical Microscope Nikon ECLIPSE LV150N. Dark Field and Bright Field. Long working distance objectives 10X, 20X, 100X.

Atomic Force Microscope Solver-Nano NT-MDT.

Network analyzer Agilent E5061B (5Hz-3GHz)

Oscilloscope/Spectrum Analyzer Tektronix MDO 3024 (200MHz/9kHz-3GHz)

Signal generator Agilent 81150A

Low-Noise Current Preamplifier Stanford Research Systems SR570

Low-Noise Preamplifier Stanford Research Systems SR560

Fluke 125 Industrial Scopemeter; DAQ-USB 6001 National Instruments.

Piezo Nanopositioner PI-Micos 30 m range and 0.2 nm resolution, and control electronics.

Hardware and software

Workstation Dual Cascade lake 16DIMMS,4xPCI. Processor Intel Xeon 4210R 10 Cores 2,4GHz 100W. DDR4 32GB 2933MHz. DDR4 32GB 2933MHz.

COMSOL Finite Element Method code with MEMS and electromagnetism modules.