Setups and instrumentation
Setup1: Optical table with HeNe laser vibrometer set-up with PSD deflection readout and photodetector for intensity modulation detection (1GHz) with optical chopper.

Setup2: Optical table with NIR laser (1.55um) vibrometer with vacuum chamber and NIR photodetector and 4-quadrant detector + diode laser deflection readout system.

Microscopy:
Optical Microscope Nikon ECLIPSE LV150N. Dark Field and Bright Field. Long working distance objectives 10X, 20X, 100X.
Atomic Force Microscope Solver-Nano NT-MDT.
Electronics instrumentation:
Network analyzer Agilent E5061B (5Hz-3GHz)
Oscilloscope/Spectrum Analyzer Tektronix MDO 3024 (200MHz/9kHz-3GHz)
Signal generator Agilent 81150A
Low-Noise Current Preamplifier Stanford Research Systems SR570
Low-Noise Preamplifier Stanford Research Systems SR560
Fluke 125 Industrial Scopemeter; DAQ-USB 6001 National Instruments.
Piezo Nanopositioner PI-Micos 30 um range and 0.2 nm resolution, and control electronics.
Hardware and software
Workstation Dual Cascade lake 16DIMMS,4xPCI. Processor Intel Xeon 4210R 10 Cores 2,4GHz 100W. DDR4 32GB 2933MHz. DDR4 32GB 2933MHz.
COMSOL Finite Element Method code with MEMS and electromagnetism modules.