Authors E.Miranda, F. Crupi, M.Nafría, i P.Falbo Citation Key 176 COinS Data Date Published 2008 Journal Applied Physics Letters Start Page 253505 Volume 92 Year of Publication 2008 ← Influence of Vacuum Environment on Conductive AFM measurements of advanced MOS Gate dielectrics → Nanometer-scale leakage current measurements in high vacuum on de-processed high-k capacitors