Authors R. Rodríguez, X. Aymerich, J. Suñé, i M. Nafría Citation Key 275 COinS Data Date Published 1997 Issue 10/11 Pagination 1517-1520 Journal Microelectronics and Reliability Volume 37 Year of Publication 1997 ← Two-step stress method for the dynamic testing of very thin (8nm) SiO2 films → Model for hydrogen desorption in SiGe(100) films