Authors
M. Lanza, X. Aymerich, M. Nafría, M. Porti, i L. Aguilera
Citation Key
308
COinS Data

Date Published
març 2009
DOI
10.1109/SCED.2009.4800474
ISBN Number
978-1-4244-2838-0
ISSN Number
BMC41
Keywords
THIN SIO2-FILMS; C-AFM; BREAKDOWN; MICROSCOPY; SIO2; DEGRADATION; STRESSES; VOLTAGE; STACKS
Pagination
234-237
Conference Location
Spanish
Publisher
IEEE, 345 E 47TH ST, NEW YORK, NY 10017 USA
Conference Name
PROCEEDINGS OF THE 2009 SPANISH CONFERENCE ON ELECTRON DEVICES
Section
234
Type of Work
Proceedings Paper
URL
http://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=4800474
Year of Publication
2009