Vés al contingut
- Accession Number
- WOS:000320424800012
- Authors
- A. Bayerl, S. de Gendt, X. Aymerich, M. Nafría, M. Porti, L. Aguilera, i M. Lanza
- Citation Key
- 411
- COinS Data
- Date Published
- Jun 2013
- DOI
- 10.1016/j.microrel.2013.02.005
- ISSN
- 0026-2714
- Keywords
- ATOMIC-FORCE MICROSCOPY, degradation, DEPOSITION, dielectrics, high-k, IMPACT, LAYERS, STRESSES
- Issue
- 6
- Pagination
- 867-871
- Journal
- Microelectronics Reliability
- Type of Article
- Article
- URL
- http://apps.webofknowledge.com/full_record.do?product=UA&search_mode=GeneralSearch&qid=2&SID=R2MgRVtjG5XTWRwBNXJ&page=2&doc=18
- Volume
- 53
- Year of Publication
- 2013