Authors M. Porti, S. Sadewasser, X. Aymerich, M. C. Blüm, i M. Nafría Citation Key 238 COinS Data Date Published 2003 Pagination 727-731 Journal Surface Science Volume 532-535 Year of Publication 2003 ← Ultra Thin Films of Atomic Force Microscopy Grown SiO2 as Gate Oxide on MOS Structures: Conduction and Breakdown Behavior → Current limited stresses of SiO2 gate oxides with Conductive Atomic Force Microscope