Vés al contingut
- Authors
- M. Lanza, P. Michalowski, L. Wilde, S. Teichert, G. Jaschke, H. Ranzinger, E. Lodermeier, G. Benstetter, X. Aymerich, M. Nafría, i M. Porti
- Citation Key
- 305
- COinS Data
- Date Published
- JUL-SEP 2009
- DOI
- 10.1016/j.mee.2009.03.020
- ISBN Number
- 463VH
- ISSN
- 0167-9317
- Keywords
- Atomic Force Microscope; High-k; Electrical characterization
- Issue
- 7-9
- Pagination
- 1921-1924
- Journal
- Microelectronic Engineering
- Start Page
- 1921
- Type of Article
- Article; Proceedings Paper
- URL
- http://www.sciencedirect.com/science/article/pii/S0167931709001622
- Volume
- 88
- Year of Publication
- 2009