Authors V. Iglesias, G. Bersuker, P. Dudek, X. Aymerich, M. Nafría, i M. Porti Citation Key 154 COinS Data Journal Journal of Vacuum Science & Technology B (accepted) Year of Publication 2011 ← Polycrystallization effects on the nanoscale electrical properties of high-k dielectrics → Correlation between the nanoscale electrical and morphological properties of crystallized hafnium oxide-based metal oxide semiconductor structures