Accession Number
11931308
Authors
A. Bayerl, X. Aymerich, M. Nafría, M. Porti, M. Lanza, i V. Iglesias
Citation Key
311
COinS Data

Date Published
FEB-2011
DOI
10.1109/SCED.2011.5744226
ISBN Number
978-1-4244-7863-7
Keywords
CAFM, high-k dielectric, polycrystallization, reliability, variability
Conference Location
Palma de Mallorca
Conference Name
Proceedings of the 8th Spanish Conference on Electron DEvices
URL
http://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=5744226
Year of Publication
2011