Authors X. Blasco, W. Vandervorst, J. Pétry, X. Aymerich, i M. Nafría Citation Key 222 COinS Data Date Published 2005 Issue 12 Pagination 2817-2819 Journal IEEE Transactions on Electron Devices Volume 52 Year of Publication 2005 ← Electrical characterization of high-dielectric-constant/SiO2 metal-oxide-semiconductor gate stacks by a conductive atomic force microscope → Enhanced electrical performance for conductive atomic force microscopy