Authors
N. Ayala, E. Simoen, X. Ayemrcih, M. Nafria, R. Rodríguez, P. Verheyen, M B González, E. Amat, i J. Martín-Martínez
Citation Key
299
COinS Data

Pagination
1384-1387
Journal
Microelectronic Engineering
Volume
88
Year of Publication
2011