Accession Number
12504180
Authors
M. Nafría, X. Aymerich, M. Lanza, J. Martín-Martínez, M. Porti, i R. Rodríguez
Citation Key
366
COinS Data

DOI
10.1109/IEDM.2011.6131500
ISBN Number
978-1-4577-0504-5
ISBN
978-1-4577-0506-9
Keywords
AFM, aging, Atomic force microscopy, atomic force process, circuit simulators, dielectrics, high-k based MOS devices, integrated circuit modeling, integrated circuit performance, Integrated circuit reliability, logic gates, MIS devices, nanoscale, nanosca
Pagination
6.3.1-6.3.4
Conference Location
Washington DC, USA
Conference Name
2011 IEEE International Electron Devices Meeting (IEDM)
URL
http://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=6131500
Year of Conference
2011