Authors J. Vizoso, M. Nafría, J. Suñé, y F. Martín Citation Key 276 COinS Data Date Published 1997 Pagination 2693-2697 Journal Journal of Vacuum Science and Technology A Volume 15 (5) Year of Publication 1997 ← Analysis of the evolution of the trapped charge distributions in 10nm SiO2 films during DC and bipolar dynamic stress → Hydrogen desorption in SiGe films: a diffusion limited process