Authors
M. Lanza, P. Michalowski, L. Wilde, S. Teichert, G. Jaschke, H. Ranzinger, E. Lodermeier, G. Benstetter, X. Aymerich, M. Nafría, y M. Porti
Citation Key
305
COinS Data

Date Published
JUL-SEP 2009
DOI
10.1016/j.mee.2009.03.020
ISBN Number
463VH
ISSN
0167-9317
Keywords
Atomic Force Microscope; High-k; Electrical characterization
Issue
7-9
Pagination
1921-1924
Journal
Microelectronic Engineering
Start Page
1921
Type of Article
Article; Proceedings Paper
URL
http://www.sciencedirect.com/science/article/pii/S0167931709001622
Volume
88
Year of Publication
2009