Authors
V. Iglesias, G. Bersuker, Z. Y. Shen, G. Benstetter, X. Aymerich, M. Nafría, M. Porti, A. Bayerl, K. Zhang, y M. Lanza
Citation Key
374
COinS Data

Date Published
September 2011
DOI
10.1063/1.3637633
ISSN
0003-6951
Keywords
AFM, Atomic force microscopy, boundaris, electric Breakdown, elemental semiconductors, Grain boundaries, hafnium boundaris, MIS structures, reliability issues, Silicon, silicon compounds, stress
Issue
10
Pagination
239901-239901-1
Journal
APPLIED PHYSICS LETTERS
Start Page
239901
URL
http://ieeexplore.ieee.org/xpl/freeabs_all.jsp?arnumber=6017972&abstractAccess=no&userType=inst
Volume
99
Year of Publication
2011