Saltar al contenido
- Accession Number
- 11931308
- Authors
- A. Bayerl, X. Aymerich, M. Nafría, M. Porti, M. Lanza, y V. Iglesias
- Citation Key
- 311
- COinS Data
- Date Published
- FEB-2011
- DOI
- 10.1109/SCED.2011.5744226
- ISBN Number
- 978-1-4244-7863-7
- Keywords
- CAFM, high-k dielectric, polycrystallization, reliability, variability
- Conference Location
- Palma de Mallorca
- Conference Name
- Proceedings of the 8th Spanish Conference on Electron DEvices
- URL
- http://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=5744226
- Year of Publication
- 2011