- Authors
- L. Aguilera, X.Aymerich, M.Nafría, W. Vandervorst, M.Porti, C.Van Haesendonck, A.Volodin, y W.Polspoel
- Citation Key
- 175
- COinS Data
- Date Published
- 2008
- Pagination
- 1445-1449
- Journal
- Journal of Vacuum Science and Technology B
- Volume
- 26(4)
- Year of Publication
- 2008