Authors
L. Aguilera, X.Aymerich, M.Nafría, W. Vandervorst, M.Porti, C.Van Haesendonck, A.Volodin, y W.Polspoel
Citation Key
175
COinS Data

Date Published
2008
Pagination
1445-1449
Journal
Journal of Vacuum Science and Technology B
Volume
26(4)
Year of Publication
2008