Authors W. Polspoel, X. Aymerich, M. Nafría, M. Porti, L. Aguilera, y W. Vandervorst Citation Key 177 COinS Data Date Published 2008 Pagination 1521-1524 Journal Microelectronics Reliability Volume 48 Year of Publication 2008 ← Electron transport through electrically induced nanoconstrictions in HfSiON stacks → Emerging yield and reliability challenges in nanometer CMOS tecnologies