Accession Number
WOS:000320424800012
Authors
A. Bayerl, S. de Gendt, X. Aymerich, M. Nafría, M. Porti, L. Aguilera, y M. Lanza
Citation Key
411
COinS Data

Date Published
Jun 2013
DOI
10.1016/j.microrel.2013.02.005
ISSN
0026-2714
Keywords
ATOMIC-FORCE MICROSCOPY, degradation, DEPOSITION, dielectrics, high-k, IMPACT, LAYERS, STRESSES
Issue
6
Pagination
867-871
Journal
Microelectronics Reliability
Type of Article
Article
URL
http://apps.webofknowledge.com/full_record.do?product=UA&search_mode=GeneralSearch&qid=2&SID=R2MgRVtjG5XTWRwBNXJ&page=2&doc=18
Volume
53
Year of Publication
2013