Authors M. Porti, B. Garrido, O. Jambois, J. Carreras, X. Aymerich, M. Nafría, y M. Avidano Citation Key 205 COinS Data Date Published 2007 Journal Journal of Applied Physics Start Page 064509 Volume 101 Year of Publication 2007 ← Reliability of SiO2 and high-k gate insulators: a nanoscale study with conductive-AFM → Systematic characterization of soft- and hard-breakdown spots using techniques with nanometer resolution