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- Authors
- A. Crespo-Yepes, X. Aymerich, M. Nafría, R. Rodríguez, y J. Martín-Martínez
- Citation Key
- 352
- COinS Data
- Date Published
- March 2013
- DOI
- 10.1116/1.4789518
- ISSN
- 1071-1023
- Keywords
- electric Breakdown, electrical conductivity transitions, electrical resistivity, Hafnium compounds, high-k dielectric thin films, MOSFET
- Issue
- 2
- Pagination
- 022203-022203-5
- Journal
- Journal of Vacuum Science & Technology B
- Start Page
- 022203
- URL
- http://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=6427427&sortType%3Ddesc_p_Publication_Year%26queryText%3Dcrespo-yepes
- Volume
- 31
- Year of Publication
- 2013