Authors
A. Crespo-Yepes, X. Aymerich, M. Nafría, R. Rodríguez, y J. Martín-Martínez
Citation Key
352
COinS Data

Date Published
March 2013
DOI
10.1116/1.4789518
ISSN
1071-1023
Keywords
electric Breakdown, electrical conductivity transitions, electrical resistivity, Hafnium compounds, high-k dielectric thin films, MOSFET
Issue
2
Pagination
022203-022203-5
Journal
Journal of Vacuum Science & Technology B
Start Page
022203
URL
http://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=6427427&sortType%3Ddesc_p_Publication_Year%26queryText%3Dcrespo-yepes
Volume
31
Year of Publication
2013