Authors L. Aguilera, X. Aymerich, M. Nafría, J.Grifoll, M. Porti, y M. Lanza Citation Key 174 COinS Data Date Published 2008 Journal Review of Scientific Instruments Start Page 073701 Volume 79 Year of Publication 2008 ← Gate oxide wear-out and breakdown effects on the performance of analog and digital circuits → Influence of Vacuum Environment on Conductive AFM measurements of advanced MOS Gate dielectrics