Citation Key 162 COinS Data Date Published 2016 Conference Name 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Year of Publication 2016 ← Top-down CMOS-NEMS polysilicon nanowire with piezoresistive transduction → Passive Temperature Compensation Method in Nonlinear NEMS Resonators Based on the Nonlinear Duffing Effect