The ECAS group research objective is the conception of new MEMS/NEMS devices focusing in resonators and relays for different applications.

Key words:

NEMS, MEMS, CMOS-MEMS, RF-MEMS, MEMS sensors, MEMS relays, mechanical resonators, oscillators,

M/NEMS integration, CMOS-VLSI, nanofabrication, micro-nanotechnologies, System-on-chip solutions,

PMUT’s, ultrasound transducers, piezoelectric transducers

Example of different mechanical resonators (SEM images) integrated monolithically with a CMOS circuitry (right optical image)