Skip to the content
2021
2020
- 2020, . Resonant Frequencies Of A Nanoscale Fractal Resonator. COMSOL conference
- 2020, . Improved Electromechanical Transduction for PiezoMUMPS HBAR Impedance Sensors. IEEE International Frequency Control Symposia
- 2020, I. Zamora, N. Barniol, A. Uranga, and E. Ledesma. Monolithic Single PMUT-on-CMOS Ultrasound System With +17 dB SNR for Imaging Applications. IEEE Access
- 2020, V. Tzanov, N. Barniol, F. Perez-Murano, F. Torres, and J. Llobet. Multi-Frequency Resonance Behaviour of a Si Fractal NEMS Resonator. Nanomaterials 10
- 2020, E. Ledesma, N. Barniol, A. Uranga, and I. Zamora. Tent-Plate AlN PMUT With a Piston-Like Shape Under Liquid Operation. IEEE Sensors Journal 20
- 2020, I. Zamora, N. Barniol, A. Uranga, and E. Ledesma. Miniaturized 0.13 μm CMOS Front-End Analog for AlN PMUT Arrays. Sensors 20
2019
- 2019, . Liquid Operable AlN PMUT with High Output Pressure Capabilities.. IEEE International Ultrasonics Symposium IUS 2019
- 2019, . Simulation of an AlN PMUT With A Crossed-Slit for Enhanced Acoustic Pressure Outputs in Liquids. COMSOL conference
- 2019, . A feasibility study of AlN ultrasonic transducers fabrication using the multi-user PiezoMUMPs process for fingerprint scanning at GHz range. Conference on Ph. D Research in Microelectronics and Electronics (PRIME),
- 2019, . Performance of CMOS-Compatible Scandium Doped AlN PMUT for Imaging Applications.. IEEE International Workshop on PiezoMEMS (IWPM),
- 2019, . AlN Piezoelectric Micromachined Ultrasonic Transducer with Piston-Like Shape for Liquid Environment Operation. IEEE International Workshop on PiezoMEMS (IWPM),
- 2019, . AlN Piezoelectric Micromachined Ultrasonic Transducer Array Monolithically Fabricated on Top of Pre-Processed CMOS Substrates. International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII
- 2019, . AlN Pmut with Crossed-Cavity for Better Acoustic Pressure Outputs in Liquid at High Frequency. International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII
- 2019, PN. Kambalis, O. Gottlieb, N. Barniol, and F. Torres. Nonlinear multi-element interactions in an elastically coupled microcantilever array subject to electrodynamic excitation. Nonlinear Dyn
2018
- 2018, . FULLY INTEGRATED CMOS-PMUT TRANSCEIVER. IEEE International Conference on Electronics Circuits and Systems
- 2018, . DESIGN OF A FULLY INTEGRATED CMOS-PMUT SYSTEM. CONFERENCE ON DESIGN OF CIRCUITS AND INTEGRATED SYSTEMS DCIS
- 2018, . Ultrasound pressure field of a resonating piezoelectric membrane with three excitation electrodes. COMSOL conference
- 2018, . Squared PMUT with enhanced pressure sensitivities. Eurosensors Conference
- 2018, . Monolithical AlN PMUT on pre-processed CMOS substrate. IEEE International Frequency Control Symposium (IFCS)
- 2018, . Phase-noise reduction in a CMOS-MEMS oscillator under nonlinear MEMS operation. IEEE International Symposium on Circuits and Systems
- 2018, . Resolution of phase difference and frequency measurements of mutually injection-locked oscillators for resonant sensing applications. Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) (20th Edition DTIP).
- 2018, . Multi-frequency silicon nanofractal resonator. 31st IEEE International Conference on Micro Electro Mechanical Systems
- 2018, . Reliability study on thin film capped monolithic CMOS-MEMS resonator with standard plastic packaging. 31st IEEE International Conference on Micro Electro Mechanical Systems
- 2018, . Mechanical relays for digital circuits. Nature Electronics 1
- 2018, . High Performance Seesaw Torsional CMOS-MEMS Relay Using Tungsten VIA Layer.. Micromachines 9
- 2018, . Ultimate limits of differential resonant MEMS sensors based on two coupled linear resonators. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 65
- 2018, . Fabrication and characterization of a hammer-shaped CMOS/BEOL-embedded nanoelectromechanical (NEM) relay. Microelectronics Engineering 192
- 2018, P. Prache, M. Riverola, N. Barniol, PM. Ferreira, and J. Juillard. Design and characterization of a monolithic CMOS-MEMS mutually injection-locked oscillator for differential resonant sensing. Sensors and Actuators A: Physical 269 160-170
2017
- 2017, . Phase-Noise Reduction in a CMOS-MEMS Oscillator Under Nonlinear MEMS Operation. IEEE TRANSACTIONS ON CIRCUITS AND SYSTEMS–I: REGULAR PAPERS
- 2017, . Ultra compact CMOS-MEMS oscillator based on a reliable metal-via MEMS resoantors with noise-matched high-gain transimpedance CMOS amplifier. 19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2017)
- 2017, . ABOVE-IC 300 MHZ AlN SAW OSCILLATOR. 19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2017)
- 2017, . Nonlinear behavior of the capacitively coupled NEMS resonator operationg close to the nonlinear regime cancellation. 19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2017)
- 2017, . Single-Resonator Dual-FrequencyBEOL-Embedded CMOS-MEMS Oscillator With Low-Power and Ultra-Compact TIA Core.. IEEE ELECTRON DEVICE LETTERS 38
- 2017, . Suppression of the A-f-mediated noise at the top bifurcation point in aMEMS resonator with both hardening and softening hysteretic cicles. Sensors and actuators A 256 59-65
- 2017, . Optimization of the Close-to-Carrier Phase Noise in a CMOS–MEMS Oscillator Using a Phase Tunable Sustaining-Amplifie. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 64 888-897
2016
2015
- 2015, . Top-down CMOS-NEMS polysilicon nanowire with piezoresistive transduction. Sensors 15
- 2015, . CMOS-NEMS Copper Switches Monolithically Integrated Using a 65 nm CMOS Technology. Micromachines 7
- 2015, . Fabrication and Measurement of a Suspended Nanochannel Microbridge Resonator monolithically Integrated with CMOS Readout Circuitry. Micromachines 7
- 2015, . Dynamic properties of Three-Terminal Tungsten CMOS-NEM Relays Under Nonlinear Tapping Mode. IEEE Sensors Journal 16
- 2015, Vidal-Álvarez, Gabriel, Gottlieb, Oded, San Paulo, Álvaro, Pérez-Murano, Francesc, Fernández-Regúlez, Marta, Sansa, Marc, Llobet, Jordi, Barniol, Núria, Abadal, Gabriel, Torres, Francesc, and Agustí, Jordi. Erratum: Top-down silicon microcantilever with coupled bottom-up silicon nanowire for enhanced mass resolution (2015 Nanotechnology 26 [http://dx.doi.org/10.1088/0957-4484/26/14/145502] 145502 ). Nanotechnology 26 259601
- 2015, Marigó, Eloi, Barniol, Núria, Uranga, Arantxa, Pérez-Murano, Francesc, and Sansa, Marc. Top-Down CMOS-NEMS Polysilicon Nanowire with Piezoresistive Transduction. Sensors 15 17036–17047
- 2015, Nicu, Liviu, Brugger, Jürgen, Savu, Veronica, Abadal, Gabriel, van der Zant, Herre SJ, Venstra, Warner J, Perez-Murano, Francesc, Barniol, Nuria, Villanueva, Luis Guillermo, and Auzelyte, Vaida. Nanoelectromechanical Systems (NEMS). Resonant MEMS: Fundamentals, Implementation, and Application
- 2015, Juillard, Jerome, Barniol, Nuria, and Vidal-Alvarez, Gabriel. A further study of reduced-order modeling techniques for nonlinear MEMS beams. Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2015 Symposium on 1–6
- 2015, Vidal-Álvarez, Gabriel, Gottlieb, Oded, Barniol, Núria, and Torres, Francesc. The influence of the parasitic current on the nonlinear electrical response of capacitively sensed cantilever resonators. Journal of Applied Physics 117 154502
- 2015, Vidal-Álvarez, Gabriel, others, San Paulo, Álvaro, Pérez-Murano, Francesc, Fernández-Regúlez, Marta, Sansa, Marc, Llobet, Jordi, Barniol, Núria, Abadal, Gabriel, Torres, Francesc, and Agusti, Jordi. Top-down silicon microcantilever with coupled bottom-up silicon nanowire for enhanced mass resolution. Nanotechnology 26 145502
- 2015, Uranga, A., Barniol, N., and Verd, J.. CMOS–MEMS resonators: from devices to applications. Microelectronic Engineering 132 58–73
- 2015, Uranga, A., Soundara-Pandian, M, Madhaven, V, Kumar-Kantimahanti, A, Zainuddin, AA, Shunmugam, M, Tay-Wee-Song, C, Marigo, E., Barniol, N., and Sobreviela, G. Dual-clock with single and monolithical 0-level vacuum packaged MEMS-on-CMOS resonator. Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on 1004–1007
2014
- 2014, Muñoz-Gamarra, J. L., Barniol, N., and Uranga, A.. NEMS Switches Monolithically Fabricated on CMOS MIM Capacitors. Procedia Engineering 87 943–946
- 2014, Juillard, Jérome, Vidal-Alvarez, Gabriel, Uranga, Arantxa, Barniol, Nuria, and Bonnoit, Alain. A Novel Architecture for Differential Resonant Sensing. Procedia Engineering 87 1573–1576
- 2014, Torres, Francesc, Barniol, Núria, and Uranga, Arantxa. Multi-cantilever Oscillator. Procedia Engineering 87 32–35
- 2014, Sobreviela, G, Barniol, N., Uranga, A., and Riverola, M. Noise effects on resonator bias polarization in CMOS-MEMS oscillators. SENSORS, 2014 IEEE 551–554
- 2014, Riverola, Martin, Barniol, Nuria, Torres, Francesc, and Vidal-Alvarez, Gabriel. CMOS-NEM relay based on tungsten VIA layer. SENSORS, 2014 IEEE 162–165
- 2014, Sobreviela, G, Barniol, N., and Uranga, A.. Tunable transimpedance sustaining-amplifier for high impedance CMOS-MEMS resonators. Microelectronics and Electronics (PRIME), 2014 10th Conference on Ph. D. Research in 1–4
- 2014, Riverola, Martin, Barniol, Nuria, Torres, Francese, and Vidal-Alvarez, Gabriel. 3-terminal tungsten CMOS-NEM relay. Microelectronics and Electronics (PRIME), 2014 10th Conference on Ph. D. Research in 1–4
- 2014, Munoz-Gamarra, J. L., Barniol, N., and Uranga, A.. Nanomechanical switches based on metal-insulator-metal capacitors from a standard complementary-metal-oxide semiconductor technology. Applied Physics Letters 104 243105
- 2014, Vidal-Alvarez, Gabriel, Gottlieb, Oded, Barniol, Nuria, and Torres, Francese. The influence of the parasitic current on the nonlinear electrical response of capacitive sensed cantilever beams. Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2014 Symposium on 1–6
- 2014, Muñoz-Gamarra, J. L., Barniol, N., Uranga, A., Torres, F., and Vidal-Álvarez, G. CMOS-MEMS switches based on back-end metal layers. Microelectronic Engineering 119 127–130
2013
- 2013, Muñoz-Contreras, F, Barniol, N., Riverola, M, Uranga, A., Segura, J., and Verd, J.. Towards a Fully-Integrated CMOS Microcalorimeter with On-Chip Quasi-Digital Output Signal. IEEE Sensors
- 2013, Verd, J., Barniol, N., Segura, J., and Uranga, A.. A 3V CMOS-MEMS OSCILLATOR IN 0.35UM CMOS TECHNOLOGY. 17th International Conference on Solid-State Sensors, Actuators and Microsystems 806-809
- 2013, Marigó, E., Barniol, N., Uranga, A., Lopez, JL, and Verd, J.. Packaged CMOS-MEMS free-free beam oscillator. J Micromech. Microeng 23
- 2013, Uranga, A., Barniol, N., Muñóz-Gamarra, J. L., Giner, J., Marigó, E., and Verd, J.. Exploitation of non-linearities in CMOS-NEMS electrostatic resonators for mechanical memories. Sensors and Actuators, A: Physical 197 88–95
- 2013, Muñoz-Gamarra, J. L., Barniol, N., Esteve, J., Uranga, A., Giner, J., Marigó, E., and Alcaine, P.. Integration of NEMS resonators in a 65 nm CMOS technology. Microelectronic Engineering
2012
- 2012, Munoz-Gamarra, J. L., Juillard, J., and Barniol, N.. Analysis of a MEMS-based ring oscillator. ISCAS 2012 – 2012 IEEE International Symposium on Circuits and Systems 2103–2106
- 2012, Ferrer, Eloi Marigó, Barniol, N., Uranga, A., Giner, J., and Muñoz-Gamarra, J. L.. A 230 MHz CMOS-MEMS bulk acoustic wave resonator. Microelectronic Engineering 98 458–462
- 2012, Giner, J., Barniol, N., Marigó, E., Muñoz-Gamarra, J. L., and Uranga, A.. VHF monolithically integrated CMOS-MEMS longitudinal bulk acoustic resonator. Electronics Letters 48 514–516
- 2012, Giner, J., Barniol, N., Marigó, E., Muñóz-Gamarra, J. L., and Uranga, A.. A fully integrated programmable dual-band RF filter based on electrically and mechanically coupled CMOS-MEMS resonators. Journal of Micromechanics and Microengineering 22
- 2012, Giner, Joan, Arcamone, Julien, Barniol, Nuria, Colinet, Eric, Muñoz-Gamarra, Jose Luis, Marigó, Eloi, and Uranga, Arantxa. Cancellation of the parasitic feedthrough current in an integrated CMOS-MEMS clamped-clamped beam resonator. Microelectronic Engineering 98 599–602
2011
- 2011, Auzelyte, V, et al, Venstra, W, Perez-Murano, F., Barniol, N., and Villanueva, LG. Nanoelectromechanical systems (NEMS). E-Nano Newsletter 24
- 2011, Giner, J., Barniol, N., Muñoz-Gamarra, J. L., Marigó, E., and Uranga, A.. UHF CMOS-MEMS bulk acoustic wave resonator. Proceedings of the IEEE International Frequency Control Symposium and Exposition
- 2011, Verd, J., Barniol, N., Segura, J., Perez-Murano, F., Uranga, A., and Sansa, M.. Metal microelectromechanical oscillator exhibiting ultra-high water vapor resolution. Lab on a Chip – Miniaturisation for Chemistry and Biology 11 2670–2672
- 2011, Marigó, E., Barniol, N., Uranga, A., Torres, F., Giner, J., Vidal, G., and Muñoz-Gamarra, J. L.. Cross coupled beams CMOS-MEMS resonator for VHF range with enhanced electrostatic detection. Microelectronic Engineering 88 2325–2329
2010
- 2010, López, J. L., Barniol, N., Uranga, A., Torres, F., L.muñoz-Gamarra, J., Giner, J., and Marigó, E.. CMOS-MEMS free-free beam resonators. 2010 Proceedings of the European Solid State Device Research Conference, ESSDERC 2010 464–467
- 2010, Muñoz-Gamarra, J. L., Barniol, N., Torres, F., Uranga, A., Giner, J., and Marigó, E.. Characterization of CMOS-MEMS resonator by pulsed mode electrostatic actuation. 2010 IEEE International Frequency Control Symposium, FCS 2010 415–418
- 2010, Giner, J., Barniol, N., Gamarra, J.L. Muñoz, Marigo, E., Torres, F., and Uranga, A.. A CMOS-MEMS filter using a V-coupler and electrical phase inversion. 2010 IEEE International Frequency Control Symposium, FCS 2010 344–348
- 2010, Marigó, E., Verd, J., Barniol, N., Uranga, A., Torres, F., Lopez, JL, Giner, J., and Muñoz-Gamarra, J. L.. Linear operation of a 11MHz CMOS-MEMS Resonator. 2010 IEEE International Frequency Control Symposium, FCS 2010 158–161
- 2010, Giner, J., Barniol, N., Marigó, E., Torres, F., and Uranga, A.. Fully CMOS integrated bandpass filter based on mechanical coupling of two RF MEMS resonators. Electronics Letters 46 640–641
- 2010, Agustí, J., N.Barniol, Santamaría, J., Pina, M., Villarroya-Gaudó, M., Sesé, J., Urbiztondo, M. A., Murillo, G., Abadal, G., and Pellejero, I.. Optical vibrometer for mechanical properties characterization of silicalite-only cantilever based sensors. Microelectronic Engineering 87 1207–1209
- 2010, López, J. L., Barniol, N., Abadal, G., Uranga, A., Marigó, E., Torres, F., Murillo, G., and Giner, J.. Third-mode 48 MHz free-free beam resonator used as a RF balun. Microelectronic Engineering 87 1256–1258
- 2010, Murillo, Gonzalo, Barniol, Nuria, Boisen, Anja, Noeth, Nadine, Cagliani, Alberto, Agusti, Jordi, Abadal, Gabriel, Keller, Stephan, and Davis, Zachary J.. Novel SU-8 based vacuum wafer-level packaging for MEMS devices. Microelectronic Engineering 87 1173–1176
- 2010, Marigó, E., Barniol, N., Esteve, J., Abadal, G., Uranga, A., Giner, J., Torres, F., Murillo, G., and Lopez, JL. Zero-level packaging of MEMS in standard CMOS technology. Journal of Micromechanics and Microengineering 20
- 2010, Vidal, Gabriel, Barniol, Nuria, Abadal, Gabriel, Torres, Francesc, and Agustí, Jordi. Proposal for measurement of repulsive Casimir forces using silicon membranes. Physica Status Solidi (C) Current Topics in Solid State Physics 7 2708–2711