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2021 2020 2020 , . Resonant Frequencies Of A Nanoscale Fractal Resonator COMSOL conference 2020 , . Improved Electromechanical Transduction for PiezoMUMPS HBAR Impedance Sensors IEEE International Frequency Control Symposia 2020 , I. Zamora, N. Barniol, A. Uranga, and E. Ledesma. Monolithic Single PMUT-on-CMOS Ultrasound System With +17 dB SNR for Imaging Applications IEEE Access 2020 , V. Tzanov, N. Barniol, F. Perez-Murano, F. Torres, and J. Llobet. Multi-Frequency Resonance Behaviour of a Si Fractal NEMS Resonator Nanomaterials 10 2020 , E. Ledesma, N. Barniol, A. Uranga, and I. Zamora. Tent-Plate AlN PMUT With a Piston-Like Shape Under Liquid Operation IEEE Sensors Journal 20 2020 , I. Zamora, N. Barniol, A. Uranga, and E. Ledesma. Miniaturized 0.13 μm CMOS Front-End Analog for AlN PMUT Arrays Sensors 20 2019 2019 , . Liquid Operable AlN PMUT with High Output Pressure Capabilities. IEEE International Ultrasonics Symposium IUS 2019 2019 , . Simulation of an AlN PMUT With A Crossed-Slit for Enhanced Acoustic Pressure Outputs in Liquids COMSOL conference 2019 , . A feasibility study of AlN ultrasonic transducers fabrication using the multi-user PiezoMUMPs process for fingerprint scanning at GHz range Conference on Ph. D Research in Microelectronics and Electronics (PRIME), 2019 , . Performance of CMOS-Compatible Scandium Doped AlN PMUT for Imaging Applications. IEEE International Workshop on PiezoMEMS (IWPM), 2019 , . AlN Piezoelectric Micromachined Ultrasonic Transducer with Piston-Like Shape for Liquid Environment Operation IEEE International Workshop on PiezoMEMS (IWPM), 2019 , . AlN Piezoelectric Micromachined Ultrasonic Transducer Array Monolithically Fabricated on Top of Pre-Processed CMOS Substrates International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII 2019 , . AlN Pmut with Crossed-Cavity for Better Acoustic Pressure Outputs in Liquid at High Frequency International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII 2019 , PN. Kambalis, O. Gottlieb, N. Barniol, and F. Torres. Nonlinear multi-element interactions in an elastically coupled microcantilever array subject to electrodynamic excitation Nonlinear Dyn 2018 2018 , . FULLY INTEGRATED CMOS-PMUT TRANSCEIVER IEEE International Conference on Electronics Circuits and Systems 2018 , . DESIGN OF A FULLY INTEGRATED CMOS-PMUT SYSTEM CONFERENCE ON DESIGN OF CIRCUITS AND INTEGRATED SYSTEMS DCIS 2018 , . Ultrasound pressure field of a resonating piezoelectric membrane with three excitation electrodes COMSOL conference 2018 , . Squared PMUT with enhanced pressure sensitivities Eurosensors Conference 2018 , . Monolithical AlN PMUT on pre-processed CMOS substrate IEEE International Frequency Control Symposium (IFCS) 2018 , . Phase-noise reduction in a CMOS-MEMS oscillator under nonlinear MEMS operation IEEE International Symposium on Circuits and Systems 2018 , . Resolution of phase difference and frequency measurements of mutually injection-locked oscillators for resonant sensing applications Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) (20th Edition DTIP). 2018 , . Multi-frequency silicon nanofractal resonator 31st IEEE International Conference on Micro Electro Mechanical Systems 2018 , . Reliability study on thin film capped monolithic CMOS-MEMS resonator with standard plastic packaging 31st IEEE International Conference on Micro Electro Mechanical Systems 2018 , . Mechanical relays for digital circuits Nature Electronics 1 2018 , . High Performance Seesaw Torsional CMOS-MEMS Relay Using Tungsten VIA Layer. Micromachines 9 2018 , . Ultimate limits of differential resonant MEMS sensors based on two coupled linear resonators IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 65 2018 , . Fabrication and characterization of a hammer-shaped CMOS/BEOL-embedded nanoelectromechanical (NEM) relay Microelectronics Engineering 192 2018 , P. Prache, M. Riverola, N. Barniol, PM. Ferreira, and J. Juillard. Design and characterization of a monolithic CMOS-MEMS mutually injection-locked oscillator for differential resonant sensing Sensors and Actuators A: Physical 269 160-1702017 2017 , . Phase-Noise Reduction in a CMOS-MEMS Oscillator Under Nonlinear MEMS Operation IEEE TRANSACTIONS ON CIRCUITS AND SYSTEMS–I: REGULAR PAPERS 2017 , . Ultra compact CMOS-MEMS oscillator based on a reliable metal-via MEMS resoantors with noise-matched high-gain transimpedance CMOS amplifier 19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2017) 2017 , . ABOVE-IC 300 MHZ AlN SAW OSCILLATOR 19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2017) 2017 , . Nonlinear behavior of the capacitively coupled NEMS resonator operationg close to the nonlinear regime cancellation 19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2017) 2017 , . Single-Resonator Dual-FrequencyBEOL-Embedded CMOS-MEMS Oscillator With Low-Power and Ultra-Compact TIA Core. IEEE ELECTRON DEVICE LETTERS 38 2017 , . Suppression of the A-f-mediated noise at the top bifurcation point in aMEMS resonator with both hardening and softening hysteretic cicles Sensors and actuators A 256 59-652017 , . Optimization of the Close-to-Carrier Phase Noise in a CMOS–MEMS Oscillator Using a Phase Tunable Sustaining-Amplifie IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 64 888-8972016 2015 2015 , . Top-down CMOS-NEMS polysilicon nanowire with piezoresistive transduction Sensors 15 2015 , . CMOS-NEMS Copper Switches Monolithically Integrated Using a 65 nm CMOS Technology Micromachines 7 2015 , . Fabrication and Measurement of a Suspended Nanochannel Microbridge Resonator monolithically Integrated with CMOS Readout Circuitry Micromachines 7 2015 , . Dynamic properties of Three-Terminal Tungsten CMOS-NEM Relays Under Nonlinear Tapping Mode IEEE Sensors Journal 16 2015 , Vidal-Álvarez, Gabriel, Gottlieb, Oded, San Paulo, Álvaro, Pérez-Murano, Francesc, Fernández-Regúlez, Marta, Sansa, Marc, Llobet, Jordi, Barniol, Núria, Abadal, Gabriel, Torres, Francesc, and Agustí, Jordi. Erratum: Top-down silicon microcantilever with coupled bottom-up silicon nanowire for enhanced mass resolution (2015 Nanotechnology 26 [http://dx.doi.org/10.1088/0957-4484/26/14/145502] 145502 ) Nanotechnology 26 2596012015 , Marigó, Eloi, Barniol, Núria, Uranga, Arantxa, Pérez-Murano, Francesc, and Sansa, Marc. Top-Down CMOS-NEMS Polysilicon Nanowire with Piezoresistive Transduction Sensors 15 17036–170472015 , Nicu, Liviu, Brugger, Jürgen, Savu, Veronica, Abadal, Gabriel, van der Zant, Herre SJ, Venstra, Warner J, Perez-Murano, Francesc, Barniol, Nuria, Villanueva, Luis Guillermo, and Auzelyte, Vaida. Nanoelectromechanical Systems (NEMS) Resonant MEMS: Fundamentals, Implementation, and Application 2015 , Juillard, Jerome, Barniol, Nuria, and Vidal-Alvarez, Gabriel. A further study of reduced-order modeling techniques for nonlinear MEMS beams Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2015 Symposium on 1–62015 , Vidal-Álvarez, Gabriel, Gottlieb, Oded, Barniol, Núria, and Torres, Francesc. The influence of the parasitic current on the nonlinear electrical response of capacitively sensed cantilever resonators Journal of Applied Physics 117 1545022015 , Vidal-Álvarez, Gabriel, others, San Paulo, Álvaro, Pérez-Murano, Francesc, Fernández-Regúlez, Marta, Sansa, Marc, Llobet, Jordi, Barniol, Núria, Abadal, Gabriel, Torres, Francesc, and Agusti, Jordi. Top-down silicon microcantilever with coupled bottom-up silicon nanowire for enhanced mass resolution Nanotechnology 26 1455022015 , Uranga, A., Barniol, N., and Verd, J.. CMOS–MEMS resonators: from devices to applications Microelectronic Engineering 132 58–732015 , Uranga, A., Soundara-Pandian, M, Madhaven, V, Kumar-Kantimahanti, A, Zainuddin, AA, Shunmugam, M, Tay-Wee-Song, C, Marigo, E., Barniol, N., and Sobreviela, G. Dual-clock with single and monolithical 0-level vacuum packaged MEMS-on-CMOS resonator Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on 1004–10072014 2014 , Muñoz-Gamarra, J. 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Metal microelectromechanical oscillator exhibiting ultra-high water vapor resolution Lab on a Chip – Miniaturisation for Chemistry and Biology 11 2670–26722011 , Marigó, E., Barniol, N., Uranga, A., Torres, F., Giner, J., Vidal, G., and Muñoz-Gamarra, J. L.. Cross coupled beams CMOS-MEMS resonator for VHF range with enhanced electrostatic detection Microelectronic Engineering 88 2325–23292010 2010 , López, J. L., Barniol, N., Uranga, A., Torres, F., L.muñoz-Gamarra, J., Giner, J., and Marigó, E.. CMOS-MEMS free-free beam resonators 2010 Proceedings of the European Solid State Device Research Conference, ESSDERC 2010 464–4672010 , Muñoz-Gamarra, J. L., Barniol, N., Torres, F., Uranga, A., Giner, J., and Marigó, E.. Characterization of CMOS-MEMS resonator by pulsed mode electrostatic actuation 2010 IEEE International Frequency Control Symposium, FCS 2010 415–4182010 , Giner, J., Barniol, N., Gamarra, J.L. Muñoz, Marigo, E., Torres, F., and Uranga, A.. 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Third-mode 48 MHz free-free beam resonator used as a RF balun Microelectronic Engineering 87 1256–12582010 , Murillo, Gonzalo, Barniol, Nuria, Boisen, Anja, Noeth, Nadine, Cagliani, Alberto, Agusti, Jordi, Abadal, Gabriel, Keller, Stephan, and Davis, Zachary J.. Novel SU-8 based vacuum wafer-level packaging for MEMS devices Microelectronic Engineering 87 1173–11762010 , Marigó, E., Barniol, N., Esteve, J., Abadal, G., Uranga, A., Giner, J., Torres, F., Murillo, G., and Lopez, JL. Zero-level packaging of MEMS in standard CMOS technology Journal of Micromechanics and Microengineering 20 2010 , Vidal, Gabriel, Barniol, Nuria, Abadal, Gabriel, Torres, Francesc, and Agustí, Jordi. Proposal for measurement of repulsive Casimir forces using silicon membranes Physica Status Solidi (C) Current Topics in Solid State Physics 7 2708–2711