Citation Key 167 COinS Data Date Published 2017 Conference Name 19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2017) Year of Publication 2017 ← Nonlinear behavior of the capacitively coupled NEMS resonator operationg close to the nonlinear regime cancellation → Ultra compact CMOS-MEMS oscillator based on a reliable metal-via MEMS resoantors with noise-matched high-gain transimpedance CMOS amplifier