Authors P. Prache, M. Riverola, N. Barniol, PM. Ferreira, and J. Juillard Citation Key 170 COinS Data Pagination 160-170 Journal Sensors and Actuators A: Physical Start Page 160 Volume 269 Year of Publication 2018 ← Phase-Noise Reduction in a CMOS-MEMS Oscillator Under Nonlinear MEMS Operation → Fabrication and characterization of a hammer-shaped CMOS/BEOL-embedded nanoelectromechanical (NEM) relay