Authors I. Zamora, N. Barniol, A. Uranga, and E. Ledesma Citation Key 179 COinS Data DOI 10.1109/ACCESS.2020.3013763 Journal IEEE Access Year of Publication 2020 ← Multi-Frequency Resonance Behaviour of a Si Fractal NEMS Resonator → Reliability study on thin film capped monolithic CMOS-MEMS resonator with standard plastic packaging