Authors Muñoz-Gamarra, J. L., Barniol, N., Torres, F., Uranga, A., Giner, J., and Marigó, E. Citation Key 77957886205 COinS Data Pagination 415–418 Conference Name 2010 IEEE International Frequency Control Symposium, FCS 2010 Year of Conference 2010 ← A CMOS-MEMS filter using a V-coupler and electrical phase inversion → CMOS-MEMS free-free beam resonators