Authors Uranga, A., Barniol, N., and Verd, J. Citation Key uranga2015cmos COinS Data Pagination 58–73 Publisher Elsevier Journal Microelectronic Engineering Volume 132 Year of Publication 2015 ← Dual-clock with single and monolithical 0-level vacuum packaged MEMS-on-CMOS resonator → Top-down silicon microcantilever with coupled bottom-up silicon nanowire for enhanced mass resolution