Authors Muñoz-Gamarra, J. L., Barniol, N., Uranga, A., Torres, F., and Vidal-Álvarez, G Citation Key munoz2014cmos COinS Data Pagination 127–130 Publisher Elsevier Journal Microelectronic Engineering Volume 119 Year of Publication 2014 ← CMOS-MEMS free-free beam resonators → The influence of the parasitic current on the nonlinear electrical response of capacitive sensed cantilever beams