Authors Munoz-Gamarra, J. L., Barniol, N., and Uranga, A. Citation Key munoz2014nanomechanical COinS Data Issue 24 Pagination 243105 Publisher AIP Publishing Journal Applied Physics Letters Volume 104 Year of Publication 2014 ← The influence of the parasitic current on the nonlinear electrical response of capacitive sensed cantilever beams → 3-terminal tungsten CMOS-NEM relay